Olympus LEXT Confocal
Olympus LEXT OLS3100 laser scanning confocal surface characterization microscope
The Olympus LEXT OLS3100 laser scanning confocal microscope meets a diverse range of surface profile characterization requirements. Its resolving capabilities fall between optical and SEM techniques but with the advantage of no sample preparation. The LEXT combines operating simplicity with advanced optics and high precision, non-contact, non-destructive metrology and inspection. Both 3D observation and high-precision 3D measurement can be achieved in real time. Its sub-micron imaging with lateral 120 nm and 10 nm axial resolution is designed for accurate three-dimensional measurement. The Olympus LEXT is ideal for imaging featureless or very low-contrast surfaces as well as transparent surfaces such as glass and ceramics. The instrument is also exceptional for locating small nano-scale features such as defects in semiconductor chips.
Features
True colour and 3D image acquisition—Dual Optical System: LED and 408 nm laser
State-of-the-art resolving power—Magnification ranges: 120x–14,400 x
Advanced stitching capability
Guaranteed accuracy and repeatability
2D and 3D image processing
2-channel display
Width measurement (120 nm lateral resolution)
Bump and film thickness measurement (10 nm axial resolution)
Line roughness measurement (P, R, and W; 10 nm axial resolution)
Surface roughness measurement (P, R, and W; 10 nm axial resolution)
Surface area measurement (0.01 μm2 resolution)
Volume measurement (0.0001 μm3 resolution)
Figure 1. Sample images of Olympus LEXT OLS3100 3D Surface Characterization Microscope.
A. 2D maximum projection image of part of an EM grid (height map).
B. 3D wire view of the part of an EM grid.
C. 2D maximum projection image of part of a Canadian penny (intensity map).
D. 3D texture view of the part of a Canadian penny.
For more information on the LEXT OLS3100, visit:
www.olympus-global.com
MORE INFORMATION
For more information about the capabilities and use of this machine, please send an e-mail.
BOOKING CALENDAR
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